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Assignment 3 - MEMS - Lab PDF

For their MEMS lab assignment, students are asked to design a bimorph cantilever pressure sensor using one of three piezoelectric materials - PZT, ZnO, or BaTiO3. They must model and simulate the device in COMSOL to study how displacement and voltage change with varying applied pressure and submit their report to the professor by the deadline.

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Rajesh Junghare
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65 views

Assignment 3 - MEMS - Lab PDF

For their MEMS lab assignment, students are asked to design a bimorph cantilever pressure sensor using one of three piezoelectric materials - PZT, ZnO, or BaTiO3. They must model and simulate the device in COMSOL to study how displacement and voltage change with varying applied pressure and submit their report to the professor by the deadline.

Uploaded by

Rajesh Junghare
Copyright
© © All Rights Reserved
Available Formats
Download as PDF, TXT or read online on Scribd
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Assignment 3

Design bimorph cantilever which act as pressure sensor.


In this assignment you have to study cantilever based MEMS pressure sensor using different
Piezoelectric Materials for micro-cantilever. In this work you can choose PZT, ZnO and BaTiO3 as
Piezoelectric Materials. You have to design, model and simulate your device in COMSOL software based
on finite element method.
The structure can be of your choice with suitable dimensions. In simulation you have to study
displacement and voltage by varying applied pressure. It is observed that the induced voltage is almost
linear with the applied force. The comparative study by simulations can be used to provide the
guidelines for a design and optimization of performance of the different piezoelectric micro-cantilever
pressure sensors
Observe and plot induced voltage and displacement with applied pressure.

For Copied assignments negative marks will be awarded.


nd

Submit report for assignments before 5 pm of 2 March.


Send report on [email protected] with label MEMS_LAB_ASSIGNMENT_X_(Roll No.)

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