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Simplified CMOS Process: Amir M. Sodagar

The document describes the simplified CMOS process for fabricating a basic CMOS chip. It involves growing silicon dioxide layers on a p-type silicon wafer and creating n-well and p-well regions through doping. Metal layers and contacts are then added to connect the n-type and p-type transistors on the chip. The process is illustrated over 15 steps.

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74 views15 pages

Simplified CMOS Process: Amir M. Sodagar

The document describes the simplified CMOS process for fabricating a basic CMOS chip. It involves growing silicon dioxide layers on a p-type silicon wafer and creating n-well and p-well regions through doping. Metal layers and contacts are then added to connect the n-type and p-type transistors on the chip. The process is illustrated over 15 steps.

Uploaded by

api-3804613
Copyright
© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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Simplified CMOS Process

Amir M. Sodagar K.N.Toosi University of Technology 1


Simplified CMOS Process

SiO2

Si wafer, p-substrate

SiO2

Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 2


Simplified CMOS Process

SiO2

Si wafer, p-substrate

SiO2

Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 3


Simplified CMOS Process

SiO2

N-Well

Si wafer, p-substrate

SiO2

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 4


Simplified CMOS Process

SiO2

N-Well

Si wafer, p-substrate

SiO2

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 5


Simplified CMOS Process

SiO2

N-Well

Si wafer, p-substrate

SiO2

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 6


Simplified CMOS Process

SiO2

N-Well

Si wafer, p-substrate

SiO2

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 7


Simplified CMOS Process

SiO2

N-Well

Si wafer, p-substrate

SiO2

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 8


Simplified CMOS Process

SiO2

N-Well

Si wafer, p-substrate

SiO2

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 9


Simplified CMOS Process

SiO2
n+ n+

N-Well

Si wafer, p-substrate

SiO2
n+ n+

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 10


Simplified CMOS Process

SiO2
n+ n+ p+ p+

N-Well

Si wafer, p-substrate

SiO2
n+ n+ p+ p+

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 11


Simplified CMOS Process

SiO2
n+ n+ p+ p+

N-Well

Si wafer, p-substrate

SiO2
n+ n+ p+ p+

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 12


Simplified CMOS Process

SiO2
n+ n+ p+ p+

N-Well

Si wafer, p-substrate

SiO2
n+ n+ p+ p+

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 13


Simplified CMOS Process

Metal
SiO2
n+ n+ p+ p+

N-Well

Si wafer, p-substrate

Metal
SiO2
n+ n+ p+ p+

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 14


Simplified CMOS Process

rc
e n r ce n
u te ai u ate rai
So G a D r So G D
Metal
SiO2
n+ n+ p+ p+

N-Well

Si wafer, p-substrate

Metal
SiO2
n+ n+ p+ p+

N-Well
Si wafer, p-substrate

Amir M. Sodagar K.N.Toosi University of Technology 15

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