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    Restrictive Flow Orifices: Cylinder Information

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    deion29
    The document discusses restrictive flow orifices (RFOs) which are used to limit the flow rate of compressed gases from cylinders. RFOs have an orifice opening that can range from 0.004" to 0.150" depending on the application. They reduce the flow rate of gases while maintaining safety. The flow rate through an RFO depends on pressure, temperature, specific gravity, and orifice opening size. Tables I and II provide example flow rates for different orifice sizes and pressures as well as common gases used with RFOs respectively.

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    Restrictive Flow Orifices: Cylinder Information

    Uploaded by

    deion29
    66 views1 page
    The document discusses restrictive flow orifices (RFOs) which are used to limit the flow rate of compressed gases from cylinders. RFOs have an orifice opening that can range from 0.004" to 0.150" depending on the application. They reduce the flow rate of gases while maintaining safety. The flow rate through an RFO depends on pressure, temperature, specific gravity, and orifice opening size. Tables I and II provide example flow rates for different orifice sizes and pressures as well as common gases used with RFOs respectively.

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    Restrictive-Flow-Orifices

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    Restrictive-Flow-Orifices

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    The document discusses restrictive flow orifices (RFOs) which are used to limit the flow rate of compressed gases from cylinders. RFOs have an orifice opening that can range from 0.004" to 0.150" depending on the application. They reduce the flow rate of gases while maintaining safety. The flow rate through an RFO depends on pressure, temperature, specific gravity, and orifice opening size. Tables I and II provide example flow rates for different orifice sizes and pressures as well as common gases used with RFOs respectively.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    66 views1 page

    Restrictive Flow Orifices: Cylinder Information

    Uploaded by

    deion29
    The document discusses restrictive flow orifices (RFOs) which are used to limit the flow rate of compressed gases from cylinders. RFOs have an orifice opening that can range from 0.004" to 0.150" depending on the application. They reduce the flow rate of gases while maintaining safety. The flow rate through an RFO depends on pressure, temperature, specific gravity, and orifice opening size. Tables I and II provide example flow rates for different orifice sizes and pressures as well as common gases used with RFOs respectively.

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    Introduction Cylinder Information

    Restrictive Flow Orifices


    The Restrictive Flow Orifice (RFO) is for use in conjunction with high purity compressed gas applications in both the semiconductor and allied chemical industries. Matheson Tri-Gas pioneered the development of RFO technology. Restrictive Flow Orifices are used to limit the potential danger of an uncontrolled flow from a compressed gas cylinder. Unchecked, the instantaneous flow from a 44 liter compressed gas cylinder filled to 2,000 psig can be as much as 20,000 liters per minute. By inserting an RFO into the outlet of the CGA connection the flow rate could be reduced by a factor of 100 to approximately 200 liters per minute. The Restrictive Flow Orifice is designed to thread into the outlet of most CGA connections that have external male threads. This would include the family of DISS face seal connections (CGA 630 and 710) that are used in high purity semiconductor applications. The RFO has no moving parts. It is about 3/8" long and is generally constructed of 316LSS. The orifice opening usually varies from 0.006" to 0.060". It is possible to have orifices that are as small as 0.004" and as large as 0.150" depending upon the application. The orifice is generally unfiltered. A KEL-F gasket is provided as part of the assembly to help create a seal between the restrictor and the valve body. Refer to Figure 1. The flow rate through an orifice is a function of the following variables: Pressure Temperature Specific Gravity Orifice Opening Correlations assist in predicting the flow of a particular gas or mixture through an RFO. This is done by first determining the flow through the same RFO at the required pressure with a reference gas and then adjusting the specific gravity accordingly. The pertinent equation is presented below. Flow = The Flow Rate of N2 at the Same Pressure 1 Specific Gravity

    Figure 1: Restrictive Flow Orifice Typical nitrogen flows for different orifice signs at different pressures can be found in Table I. By using this table, a reference flow rate for nitrogen can be determined and then the reference equation can be used with this value. For a mixture a "weighted" or "averaged" specific gravity can be used by multiplying the volume or mole fraction of each component by its specific gravity and then summing. Table II summarizes some of the gases that can be offered with restrictive flow orifices. In addition to providing safety features that have been mandated by various local and state codes, the restrictive flow orifice also results in a lower flow rate, which is desirable in many semiconductor applications. While the RFO was not designed to be a modulator or control valve, it will as its name implies, substantially reduce the flow rate under a specific set of pressure and temperature conditions for a given gas. More detailed information on restrictive flow orifices is available from your local Matheson Tri-Gas Sales Engineer. TABLE I Orifice Flow Rate at Varying Pressures Orifice Size 0.006 in. 0.010 in. 0.031 in. 0.040 in. 0.052 in. Pressure-PSIG 500 1000 7 slpm 15 slpm l8 slpm 36 slpm 150 slpm 310 slpm 245 slpm 485 slpm 535 slpm

    0 0 slpm 0 slpm 0 slpm 0 slpm 0 slpm

    2000 29 slpm 73 slpm

    TABLE II Gases offered with Restrictive Flow Orifices Specific Gravity @ 70 (1 atm), CGA and DISS Connections Gas Ammonia Argon Arsenic Pentafluoride Arsine Boron Trichloride Boron Trifluoride Carbon Dioxide Carbon Monoxide Chlorine Diborane Dichlorosilane Disilane Germane Halocarbon 11 Halocarbon 115 Specific Gravity 0.593 1.376 6.090 2.718 4.045 2.375 1.527 0.967 2.479 0.950 3.473 2.149 2.634 4.770 5.568 CGA STD DISS 660 720 - 718 - 642 - 632 660 634 330 642 320 716 350 724 660 728 350 632 678 638 - 632 350 632 660 660 716 Gas Halocarbon 116 Halocarbon 12 Halocarbon 13 Halocarbon 14 Halocarbon 23 Helium Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Fluoride Hydrogen Selenide Hydrogen Sulfide Krypton Neon Nitrogen Specific Gravity 4.820 4.262 3.610 3.075 2.436 0.138 0.070 2.780 1.266 0.689 2.771 1.192 2.900 0.696 0.967 CGA STD DISS 660 716 660 716 660 716 - 716 660 716 - 718 350 724 330 634 330 634 670 638 350 632 330 722 - 718 - 718 - 718 Specific Gas Gravity Nitrogen Trifluoride 2.460 Nitrous Oxide 1.528 1.105 Oxygen Perfluoropropane 6.652 Phosphine 1.190 Phosphorus Pentafluoride 4.310 Silane 1.120 5.833 Silicon Tetrachloride 3.615 Silicon Tetrafluoride Sulfur Hexafluoride 5.105 4.666 Trichlorosilane Tungsten Hexafluoride 10.674 Xenon 4.558 CGA STD DISS 670 640 326 540 714 660 716 350 632 330 642 350 632 - 636 330 642 - 716 - 636 670 638 - 716

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