About
Ph.D. in Materials Science & Engineering. Years of industrial experience in R&D and…
Experience
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Education
Patents
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Semiconductor Device Cavity Formation Using Directional Deposition
Issued US 11,942,361
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Wordline Contact Formation in NAND Devices
Issued US 11,778,832
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Techniques and Device Structures Based Upon Directional Dielectric Deposition and Bottom-Up Fill
Issued US 11,459,652
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Selective Etching of Photoresist for Bridge Defects Removal
Issued US 10,937,663
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Techniques for Processing a Polycrystalline Layer Using an Angled Ion Beam
Issued US 10,553,448
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Performance Improvement of EUV Photoresist by Ion Implantation
Issued US 10,545,408
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Multiple Patterning Approach Using Ion Implantation
Issued US 10,310,379
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Critical Dimensions Variance Compensation
Issued US 10,269,663
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Three Dimensional Structure Fabrication Control Using Novel Processing System
Issued US 10,222,202
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Non-Uniform Gate Oxide Thickness for DRAM Device
Issued US 10,204,909
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Sputter Etch Material Selectivity
Issued US 10,000,764
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High Efficiency Apparatus and Method for Depositing a Layer on a Three Dimensional Structure
Issued US 9,929,015
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Ion-Assisted Deposition and Implantation of Photoresist to Improve Line Edge Roughness
Issued US 9,885,957
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Ion Implantation for Improved Contact Hole Critical Dimension Uniformity
Issued US 9,735,013
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Ion-Assisted Deposition and Implantation of Photoresist to Improve Line Edge Roughness
Issued US 9,659,784
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Ion Implantation for Improved Etch Performance
Issued US 9,520,290
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Multiple Exposure Treatment for Processing a Patterning Feature
Issued US 9,512,517
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Techniques and Apparatus for Anisotropic Metal Etching
Issued US 9,460,961
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Ion Implant Assisted Metal Etching
Issued US 9,435,038
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Methods and Apparatus for Selective Deposition
Issued US 9,385,219
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Techniques and Apparatus for Anisotropic Metal Etching
Issued US 9,396,965
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Electric/Magnetic Field Guided Acid Diffusion
Issued US 9,377,692
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Apparatus and Method for Dynamic Control of Ion Beam Energy and Angle
Issued US 9,336,998
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Techniques for Patterning a Substrate
Issued US 9,268,228
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Material Engineering for High Performance Li-Ion Battery Electrodes
Issued US 8,906,576
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Condensing Heat Exchanger with Hydrophilic Antimicrobial Coating
Issued US 8,763,682
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Microgravity Condensing Heat Exchanger
Issued US 7,913,499
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Ribbon Beam Plasma Enhanced Chemical Vapor Deposition System for Anisotropic Deposition of Thin Films
Filed US 16/840,424
Languages
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English
Native or bilingual proficiency
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Chinese
Native or bilingual proficiency
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