Evaporation

Evaporation is a type of vaporization of a liquid that occurs from the surface of a liquid into a gaseous phase that is not saturated with the evaporating substance. The other type of vaporization is boiling, which is characterized by bubbles of saturated vapor forming in the liquid phase. Steam produced in a boiler is another example of evaporation occurring in a saturated vapor phase. Evaporation that occurs directly from the solid phase below the melting point, as commonly observed with ice at or below freezing or moth crystals (napthalene or paradichlorobenzene), is called sublimation.

On average, a fraction of the molecules in a glass of water have enough heat energy to escape from the liquid. Water molecules from the air enter the water in the glass, but as long as the relative humidity of the air in contact is less than 100% (saturation), the net transfer of water molecules will be to the air. The water in the glass will be cooled by the evaporation until an equilibrium is reached where the air supplies the amount of heat removed by the evaporating water. In an enclosed environment the water would evaporate until the air is saturated.

Evaporation (deposition)

Evaporation is a common method of thin-film deposition. The source material is evaporated in a vacuum. The vacuum allows vapor particles to travel directly to the target object (substrate), where they condense back to a solid state. Evaporation is used in microfabrication, and to make macro-scale products such as metallized plastic film.

Physical principle

Evaporation involves two basic processes: a hot source material evaporates and condenses on the substrate. It resembles the familiar process by which liquid water appears on the lid of a boiling pot. However, the gaseous environment and heat source (see "Equipment" below) are different.

Evaporation takes place in a vacuum, i.e. vapors other than the source material are almost entirely removed before the process begins. In high vacuum (with a long mean free path), evaporated particles can travel directly to the deposition target without colliding with the background gas. (By contrast, in the boiling pot example, the water vapor pushes the air out of the pot before it can reach the lid.) At a typical pressure of 10⁻⁴Pa, an 0.4-nm particle has a mean free path of 60 m. Hot objects in the evaporation chamber, such as heating filaments, produce unwanted vapors that limit the quality of the vacuum.