A thin film pressure sensor with double sensitive units
H Pan, G Hu, P Cao, Y Wang, Y Ge… - … on Information and …, 2015 - ieeexplore.ieee.org
H Pan, G Hu, P Cao, Y Wang, Y Ge, F Shuang
2015 IEEE International Conference on Information and Automation, 2015•ieeexplore.ieee.orgThe paper expresses two strategies for improving the sensitivity of capacitive pressure
sensor. Microstructuring of dielectric elastomer surface can significantly increase
capacitance response of the sensor due to raising permittivity and elasticity of dielectric. For
the thin sensor, multi sensor units using stacked structure have multiplied effect in signal
output.
sensor. Microstructuring of dielectric elastomer surface can significantly increase
capacitance response of the sensor due to raising permittivity and elasticity of dielectric. For
the thin sensor, multi sensor units using stacked structure have multiplied effect in signal
output.
The paper expresses two strategies for improving the sensitivity of capacitive pressure sensor. Microstructuring of dielectric elastomer surface can significantly increase capacitance response of the sensor due to raising permittivity and elasticity of dielectric. For the thin sensor, multi sensor units using stacked structure have multiplied effect in signal output.
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