A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency
Abstract
:1. Introduction
2. Theory
2.1. Theoretical Structure
2.2. The Location of the SPBs for Achieving Axial-Deformation
2.3. The Stress of the SPBs
2.4. The Frequency of the Structure
3. Theoretical Validation
w1 | L1 | e1 | d1 | e2 | d2 | w2 | L2 | T | b | h | l | dgap | |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Initial dimensions (μm) | 70 | 500 | 430 | 395 | 1600 | 1000 | 30 | 500 | 310 | 5 | 10 | 70 | 70 |
3.1. The Effects of Various Geometrical Parameters on D
w1 | L1 | e1 | d1 | |
Geometrical dismension range (μm) | 40–100 | 400–650 | 380–680 | 195–795 |
Max relative error | 10.9% | 9.4% | 4.8% | 5.1% |
e2 | d2 | w2 | L2 | |
Geometrical dismension range (μm) | 1400–2000 | 800–1400 | 30–90 | 50–650 |
Max relative error | 5.0% | 4.5% | 7.1% | 4.6% |
3.2. The Effects of Various Geometrical Parameters on σ and f
w1 | L1 | e1 | d1 | e2 | d2 | w2 | L2 | |
---|---|---|---|---|---|---|---|---|
Maximum relative error of σ | 10.3% | 7.1% | 8.3% | 6.3% | 6.7% | 6.8% | 9.4% | 6.4% |
Max relative error of f | 8.0% | 6.2% | 3.7% | 3.5% | 3.2% | 2.6% | 2.9% | 2.8% |
4. Results
Gas Flow (sccm) | RF Power (W) | Working Pressure (Pa) | Etching Rate (μm/min) | |
---|---|---|---|---|
RIE | SF6:20 | 20 | 8 | 0.4 |
DRIE | SF6:130 O2:13 C4F8:85 | Source power:1000 Bias power:20 | 5.7 | 4 |
w2 = 30 μm | w2 = 70 μm | w2 = 90 μm | |
---|---|---|---|
Measuring sensitivity (mV/g/3V) | 0.666 | 0.505 | 0.363 |
Resonant frequency (kHz) | 17.1 | 16.9 | 17.2 |
5. Discussion
6. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Xu, Y.; Zhao, L.; Jiang, Z.; Ding, J.; Peng, N.; Zhao, Y. A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency. Sensors 2016, 16, 210. https://doi.org/10.3390/s16020210
Xu Y, Zhao L, Jiang Z, Ding J, Peng N, Zhao Y. A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency. Sensors. 2016; 16(2):210. https://doi.org/10.3390/s16020210
Chicago/Turabian StyleXu, Yu, Libo Zhao, Zhuangde Jiang, Jianjun Ding, Niancai Peng, and Yulong Zhao. 2016. "A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency" Sensors 16, no. 2: 210. https://doi.org/10.3390/s16020210