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Simulations of CMOS pixel sensors with a small collection electrode, improved for a faster charge collection and increased radiation tolerance

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Published 15 May 2019 © 2019 CERN
, , The 9th International Workshop on Semiconductor Pixel Detectors for Particles and Imaging Citation M. Munker et al 2019 JINST 14 C05013 DOI 10.1088/1748-0221/14/05/C05013

1748-0221/14/05/C05013

Abstract

CMOS pixel sensors with a small collection electrode combine the advantages of a small sensor capacitance with the advantages of a fully monolithic design. The small sensor capacitance results in a large ratio of signal-to-noise and a low analogue power consumption, while the monolithic design reduces the material budget, cost and production effort. However, the low electric field in the pixel corners of such sensors results in an increased charge collection time, that makes a fully efficient operation after irradiation and a timing resolution in the order of nanoseconds challenging for pixel sizes larger than approximately forty micrometers. This paper presents the development of concepts of CMOS sensors with a small collection electrode to overcome these limitations, using three-dimensional Technology Computer Aided Design simulations. The studied design uses a 0.18 μm process implemented on a high-resistivity epitaxial layer.

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10.1088/1748-0221/14/05/C05013