"AdaOPC 2.0: Enhanced Adaptive Mask Optimization Framework for via Layers."

Wenqian Zhao et al. (2024)

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DOI: 10.1109/TCAD.2024.3378600

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type: Journal Article

metadata version: 2025-06-04

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Wenqian Zhao, Xufeng Yao, Shuo Yin, Yang Bai, Ziyang Yu, Yuzhe Ma, Bei Yu, Martin D. F. Wong:
AdaOPC 2.0: Enhanced Adaptive Mask Optimization Framework for via Layers. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 43(9): 2674-2686 (2024)

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