"On the fidelity of the ax+b equipment model for clustered photolithography ..."

James R. Morrison (2011)

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DOI: 10.1109/WSC.2011.6147916

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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James R. Morrison:
On the fidelity of the ax+b equipment model for clustered photolithography scanners in fab-level simulation. WSC 2011: 2034-2044

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