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"Fabrication Process and Performance Analysis of AlN based Piezoelectric ..."
Li Wang et al. (2019)
- Li Wang, Yihsiang Chiu, Dan Gong, Shenglin Ma, Yang Yang, Heng Li, Hungping Lee, Huguang Liu, Yufeng Jin:
Fabrication Process and Performance Analysis of AlN based Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Structure. NEMS 2019: 514-519
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