"Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on ..."

Xu Lu et al. (2020)

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DOI: 10.1109/TIM.2020.2966315

access: closed

type: Journal Article

metadata version: 2020-06-08

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Xu Lu, Yonggui Yuan, Chi Ma, Haibo Zhu, Yunlong Zhu, Zhangjun Yu, Xiaojun Zhang, Fuqiang Jiang, Jianzhong Zhang, Hanyang Li, Jun Yang, Libo Yuan:
Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on Differential White Light Interferometry. IEEE Trans. Instrum. Meas. 69(5): 2507-2514 (2020)

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