"Optical deflection measurement for characterization of ..."

Samara L. Firebaugh et al. (2004)

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DOI: 10.1109/TIM.2004.831504

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type: Journal Article

metadata version: 2024-11-12

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Samara L. Firebaugh, Harry K. Charles Jr., Richard L. Edwards, Allen C. Keeney, Samuel F. Wilderson:
Optical deflection measurement for characterization of microelectromechanical systems (MEMS). IEEE Trans. Instrum. Meas. 53(4): 1047-1051 (2004)

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