"An ILD Void Detection Method for Monolithic 3-D ICs Based on Switched ..."

Ziwen Xiao, Zhiming Yang, Yang Yu (2023)

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DOI: 10.1109/TCAD.2022.3226318

access: closed

type: Journal Article

metadata version: 2023-08-31

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Ziwen Xiao, Zhiming Yang, Yang Yu:
An ILD Void Detection Method for Monolithic 3-D ICs Based on Switched Capacitors. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 42(8): 2728-2737 (2023)

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