"Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A ..."

Chen Wang et al. (2020)

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DOI: 10.3390/S20144054

access: open

type: Journal Article

metadata version: 2024-07-04

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Chen Wang, Fang Chen, Yuan Wang, Sina Sadeghpour, Chenxi Wang, Mathieu Baijot, Rui Esteves, Chun Zhao, Jian Bai, Huafeng Liu, Michael Kraft:
Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review. Sensors 20(14): 4054 (2020)

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