"Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and ..."

Maksymilian Kurek et al. (2016)

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DOI: 10.3390/S16071097

access: open

type: Journal Article

metadata version: 2019-10-19

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Maksymilian Kurek, Frederik K. Larsen, Peter E. Larsen, Silvan Schmid, Anja Boisen, Stephan Sylvest Keller:
Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties. Sensors 16(7): 1097 (2016)

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