BibTeX record journals/pieee/Brueck05

download as .bib file

@article{DBLP:journals/pieee/Brueck05,
  author       = {Steven R. J. Brueck},
  title        = {Optical and Interferometric Lithography - Nanotechnology Enablers},
  journal      = {Proc. {IEEE}},
  volume       = {93},
  number       = {10},
  pages        = {1704--1721},
  year         = {2005},
  url          = {https://doi.org/10.1109/JPROC.2005.853538},
  doi          = {10.1109/JPROC.2005.853538},
  timestamp    = {Fri, 02 Oct 2020 14:42:39 +0200},
  biburl       = {https://dblp.org/rec/journals/pieee/Brueck05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.