"Efficient and flexible Focused Ion Beam micromachining of Solid Immersion ..."

Philipp Scholz et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.062

access: closed

type: Journal Article

metadata version: 2020-02-22

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Philipp Scholz, Norbert Herfurth, Michael Sadowski, Ted R. Lundquist, Uwe Kerst, Christian Boit:
Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm. Microelectron. Reliab. 54(9-10): 1794-1797 (2014)

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