"Electrical characterization of zirconium silicate films obtained from ..."

Albena Paskaleva et al. (2003)

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DOI: 10.1016/S0026-2714(03)00180-X

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type: Journal Article

metadata version: 2024-10-06

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Albena Paskaleva, Martin Lemberger, Stefan Zürcher, Anton J. Bauer, Lothar Frey, Heiner Ryssel:
Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors. Microelectron. Reliab. 43(8): 1253-1257 (2003)

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