"TorchResist: Open-Source Differentiable Resist Simulator."

Zixiao Wang et al. (2025)

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DOI: 10.48550/ARXIV.2502.06838

access: open

type: Informal or Other Publication

metadata version: 2025-03-12

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  - https://dblp.org/rec/journals/corr/abs-2502-06838
Zixiao Wang, Jieya Zhou, Su Zheng, Shuo Yin, Kaichao Liang, Shoubo Hu, Xiao Chen, Bei Yu:
TorchResist: Open-Source Differentiable Resist Simulator. CoRR abs/2502.06838 (2025)

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