"FEOL Monolithic Co-Integration of FeFET and CMOS on 8-Inch Wafer Using ..."

Bohyeon Kang et al. (2024)

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DOI: 10.1109/ACCESS.2024.3440321

access: open

type: Journal Article

metadata version: 2024-08-22

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Bohyeon Kang, Jehyun An, Jongseo Park, Giryun Hong, Beomjoo Ham, Jaeseong Pyo, Sung-Min Ahn, Rock-Hyun Baek:
FEOL Monolithic Co-Integration of FeFET and CMOS on 8-Inch Wafer Using Laser Spike Annealing With Implementation of an FeFET Inverter. IEEE Access 12: 110273-110282 (2024)

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