"Stitch-Aware Routing Considering Smart Boundary for Multiple E-Beam ..."

Chih-Hsiang Hsu, Shao-Yun Fang (2020)

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DOI: 10.1109/VLSI-DAT49148.2020.9196298

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type: Conference or Workshop Paper

metadata version: 2020-09-29

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Chih-Hsiang Hsu, Shao-Yun Fang:
Stitch-Aware Routing Considering Smart Boundary for Multiple E-Beam Lithography. VLSI-DAT 2020: 1-4

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