BibTeX record conf/nems/WenXCW14

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@inproceedings{DBLP:conf/nems/WenXCW14,
  author       = {Li Wen and
                  Han Xie and
                  Jiaru Chu and
                  Hai Wang},
  title        = {Development of microplasma devices arrays for maskless nanoscale material
                  etching},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {358--361},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908826},
  doi          = {10.1109/NEMS.2014.6908826},
  timestamp    = {Wed, 18 Jan 2023 10:21:15 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WenXCW14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}