"Broadband piezoelectric micromachined ultrasonic transducer (pMUT) using ..."

Tao Wang, Takeshi Kobayashi, Chengkuo Lee (2015)

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DOI: 10.1109/NEMS.2015.7147418

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Tao Wang, Takeshi Kobayashi, Chengkuo Lee:
Broadband piezoelectric micromachined ultrasonic transducer (pMUT) using mode-merged design. NEMS 2015: 238-242

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