"A novel scheme design of a high-g optical NEMS accelerometer based on a ..."

Qianbo Lu et al. (2015)

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DOI: 10.1109/NEMS.2015.7147420

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-25

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Qianbo Lu, Jian Bai, Wenxiu Lian, Shuqi Lou:
A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth. NEMS 2015: 248-253

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