"Tentative bonding effect for maintaining alignment accuracy in bonding ..."

Masahiro Kondo et al. (2015)

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DOI: 10.1109/NEMS.2015.7147474

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Masahiro Kondo, Hidetoshi Miyashita, Sang-Seok Lee, Nobuo Matsuoka:
Tentative bonding effect for maintaining alignment accuracy in bonding utilizing thick SU8 as an adhesive material. NEMS 2015: 487-490

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