BibTeX record conf/nems/HsiehL12

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@inproceedings{DBLP:conf/nems/HsiehL12,
  author       = {Yi{-}Ta Hsieh and
                  Yung{-}Chun Lee},
  title        = {Metal contact printing photolithography for fabricating sub-micrometer
                  patterned sapphire substrates in light-emitting diodes},
  booktitle    = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages        = {40--44},
  publisher    = {{IEEE}},
  year         = {2012},
  url          = {https://doi.org/10.1109/NEMS.2012.6196718},
  doi          = {10.1109/NEMS.2012.6196718},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HsiehL12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}