"A High Accuracy Resonant Pressure Sensor with Lateral Driven and ..."

Xiangguang Han et al. (2019)

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DOI: 10.1109/NEMS.2019.8915599

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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Xiangguang Han, Libo Zhao, Xuejiao Li, Ping Yang, Hongyan Wang, Zhuangde Jiang:
A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection. NEMS 2019: 167-171

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