"Silicon 3D-integration technology and systems."

Pascal Urard et al. (2010)

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DOI: 10.1109/ISSCC.2010.5433859

access: closed

type: Conference or Workshop Paper

metadata version: 2019-05-09

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Pascal Urard, Ken Takeuchi, Kerry Bernstein, Hideto Hidaka, Michael Phan, Joo-Sun Choi, Bob Payne, Vladimir Stojanovic, Kees van Berkel, Takayasu Sakurai:
Silicon 3D-integration technology and systems. ISSCC 2010: 510-511

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