"Timing analysis and optimization implications of bimodal CD distribution ..."

Kwangok Jeong, Andrew B. Kahng (2009)

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DOI: 10.1109/ASPDAC.2009.4796527

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Kwangok Jeong, Andrew B. Kahng:
Timing analysis and optimization implications of bimodal CD distribution in double patterning lithography. ASP-DAC 2009: 486-491

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