"Finite Element Simulation Analysis of Temperature Field of MEMS Gas Sensor ..."

Xiaojuan Li et al. (2021)

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DOI: 10.1109/AIAM54119.2021.00099

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type: Conference or Workshop Paper

metadata version: 2022-03-24

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Xiaojuan Li, Yidong Yuan, Yabing Li, Jinwen Liu, Siqi Li, Yu Liu, Yan Cheng:
Finite Element Simulation Analysis of Temperature Field of MEMS Gas Sensor Based on ANSYS Software. AIAM (IEEE) 2021: 468-471

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