A workflow management system for cross-system processes in semiconductor supply chains - Tim Russland; Hans Ehm; Thomas Ponsignon (2012 IEEE International Conference on Automation Science and Engineering, CASE 2012, Seoul, Korea (South), August 20-24, 2012, 2012)

A discussion of object-oriented process modeling approaches for discrete manufacturing on the example of the semiconductor industry - Hans Ehm; Stefan Heilmayer; Thomas Ponsignon; Tim Russland (Proceedings of the 2010 Winter Simulation Conference, WSC 2010, Baltimore, Maryland, USA, 5-8 December 2010, 2010)