Electrical characterization of HfO\(_2\) films obtained by UV assisted injection MOCVD - J. M. Decams; H. Guillon; Carmen Jiménez; M. Audier; J. P. Sénateur; C. Dubourdieu; O. Cadix; Barry J. O'Sullivan; Mircea Modreanu; Paul K. Hurley (Microelectron. Reliab., 2005)