BibTeX records: Yilong Hao

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@article{DBLP:journals/sensors/YangZCGHY23,
  author       = {Lingmeng Yang and
                  Zhezheng Zhu and
                  Wangnan Chen and
                  Chengchen Gao and
                  Yilong Hao and
                  Zhenchuan Yang},
  title        = {Quantitative Analysis Method and Correction Algorithm Based on Directivity
                  Beam Pattern for Mismatches between Sensitive Units of Acoustic Dyadic
                  Sensors},
  journal      = {Sensors},
  volume       = {23},
  number       = {12},
  pages        = {5709},
  year         = {2023},
  url          = {https://doi.org/10.3390/s23125709},
  doi          = {10.3390/S23125709},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/YangZCGHY23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NieHMGY23,
  author       = {Shaoxiao Nie and
                  Yilong Hao and
                  Fanrui Meng and
                  Chenhchen Gao and
                  Zhenchuan Yang},
  title        = {A micro and low-cost packaging technology of high accuracy piezoresistive
                  pressure sensors with Parylene coating},
  booktitle    = {18th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2023, Jeju Island, Korea, Republic of, May
                  14-17, 2023},
  pages        = {128--131},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/NEMS57332.2023.10190892},
  doi          = {10.1109/NEMS57332.2023.10190892},
  timestamp    = {Mon, 14 Aug 2023 15:37:27 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/NieHMGY23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/sensors/ChangYZYHG21,
  author       = {Wenhan Chang and
                  Lingmeng Yang and
                  Zhezheng Zhu and
                  Zhenchuan Yang and
                  Yilong Hao and
                  Chengchen Gao},
  title        = {Design and Optimization of Sensitivity Enhancement Package for MEMS-Based
                  Thermal Acoustic Particle Velocity Sensor},
  journal      = {Sensors},
  volume       = {21},
  number       = {13},
  pages        = {4337},
  year         = {2021},
  url          = {https://doi.org/10.3390/s21134337},
  doi          = {10.3390/S21134337},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/ChangYZYHG21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icicdt/ChangLCSGH19,
  author       = {Wenhan Chang and
                  Zhe Li and
                  Shengzhan Cheng and
                  Shoule Sun and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal
                  Acoustic Particle Velocity Sensors},
  booktitle    = {International Conference on {IC} Design and Technology, {ICICDT} 2019,
                  Suzhou, China, June 17-19, 2019},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/ICICDT.2019.8790911},
  doi          = {10.1109/ICICDT.2019.8790911},
  timestamp    = {Mon, 09 Aug 2021 14:54:04 +0200},
  biburl       = {https://dblp.org/rec/conf/icicdt/ChangLCSGH19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icicdt/LiYTHWWZYS19,
  author       = {Yue Li and
                  Ruiyuan Yin and
                  Ming Tao and
                  Yilong Hao and
                  Cheng P. Wen and
                  Maojun Wang and
                  Jie Zhang and
                  Xuelin Yang and
                  Bo Shen},
  title        = {High-Performance Quasi-Vertical GaN Schottky Barrier Diode on Silicon
                  Substrate with a Low Dislocation Density Drift Layer},
  booktitle    = {International Conference on {IC} Design and Technology, {ICICDT} 2019,
                  Suzhou, China, June 17-19, 2019},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/ICICDT.2019.8790866},
  doi          = {10.1109/ICICDT.2019.8790866},
  timestamp    = {Tue, 19 Aug 2025 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/icicdt/LiYTHWWZYS19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icicdt/SunMCLCWLGH19,
  author       = {Shoule Sun and
                  Fanrui Meng and
                  Wenhan Chang and
                  Zhe Li and
                  Shengzhan Cheng and
                  Jie Wang and
                  Yunfei Liu and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {A method for real-time measurement of seismic isolation rubber bearing
                  based on embedded {MEMS} pressure sensors},
  booktitle    = {International Conference on {IC} Design and Technology, {ICICDT} 2019,
                  Suzhou, China, June 17-19, 2019},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/ICICDT.2019.8790933},
  doi          = {10.1109/ICICDT.2019.8790933},
  timestamp    = {Fri, 18 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/icicdt/SunMCLCWLGH19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icicdt/YinLLWHFW19,
  author       = {Ruiyuan Yin and
                  Yue Li and
                  Wei Lin and
                  Cheng P. Wen and
                  Yilong Hao and
                  Yunyi Fu and
                  Maojun Wang},
  title        = {Toward Reliable Extraction of the Properties of Border Traps in Lateral
                  GaN Power {MOSFET} with a Distributed Network Model},
  booktitle    = {International Conference on {IC} Design and Technology, {ICICDT} 2019,
                  Suzhou, China, June 17-19, 2019},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/ICICDT.2019.8790921},
  doi          = {10.1109/ICICDT.2019.8790921},
  timestamp    = {Wed, 16 Oct 2024 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/icicdt/YinLLWHFW19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TranGH17,
  author       = {Quochung Tran and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {Design of an ultra-low pressure sensor based on the growth of graphene
                  on silicon dioxide surface},
  booktitle    = {12th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
                  2017},
  pages        = {526--529},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/NEMS.2017.8017077},
  doi          = {10.1109/NEMS.2017.8017077},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TranGH17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuoLGHJ17,
  author       = {Zhongliang Luo and
                  Zhe Li and
                  Chengchen Gao and
                  Yilong Hao and
                  Yufeng Jin},
  title        = {Anemometer for detection of very low speed air flow with three-dimensional
                  directionality},
  booktitle    = {12th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
                  2017},
  pages        = {615--618},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/NEMS.2017.8017098},
  doi          = {10.1109/NEMS.2017.8017098},
  timestamp    = {Thu, 07 Sep 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LuoLGHJ17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/ijcnn/HaoTRM16,
  author       = {Yilong Hao and
                  Kanishka Tyagi and
                  Rohit Rawat and
                  Michael T. Manry},
  title        = {Second order design of multiclass kernel machines},
  booktitle    = {2016 International Joint Conference on Neural Networks, {IJCNN} 2016,
                  Vancouver, BC, Canada, July 24-29, 2016},
  pages        = {3233--3240},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/IJCNN.2016.7727612},
  doi          = {10.1109/IJCNN.2016.7727612},
  timestamp    = {Wed, 16 Oct 2019 14:14:55 +0200},
  biburl       = {https://dblp.org/rec/conf/ijcnn/HaoTRM16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuiZLHG16,
  author       = {Yiming Gui and
                  Yangxi Zhang and
                  Guandong Liu and
                  Yilong Hao and
                  Chengchen Gao},
  title        = {Design and simulation of corrugated diaphragm applied to the {MEMS}
                  fiber optic pressure sensor},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {152--155},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758220},
  doi          = {10.1109/NEMS.2016.7758220},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GuiZLHG16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangGMGH16,
  author       = {Yangxi Zhang and
                  Yiming Gui and
                  Fanrui Meng and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {Design of a graphene capacitive pressure sensor for ultra-low pressure
                  detection},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {192--195},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758230},
  doi          = {10.1109/NEMS.2016.7758230},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangGMGH16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuZCSZH16,
  author       = {Kaisi Xu and
                  Ningli Zhu and
                  Shan Cao and
                  Weiguo Su and
                  Wei Zhang and
                  Yilong Hao},
  title        = {Design and simulation of {MEMS} thermal and vibration isolator based
                  on {PDMS} beam arrays},
  booktitle    = {11th {IEEE} Annual International Conference on Nano/Micro Engineered
                  and Molecular Systems, {NEMS} 2016, Sendai, Japan, April 17-20, 2016},
  pages        = {213--216},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/NEMS.2016.7758235},
  doi          = {10.1109/NEMS.2016.7758235},
  timestamp    = {Thu, 05 Aug 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XuZCSZH16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuCHZZGH15,
  author       = {Guandong Liu and
                  W. P. Cui and
                  H. Hu and
                  F. S. Zhang and
                  Yangxi Zhang and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {High temperature pressure sensor using a thermostable electrode},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {201--204},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147410},
  doi          = {10.1109/NEMS.2015.7147410},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiuCHZZGH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuZZSZH15,
  author       = {Kaisi Xu and
                  Ningli Zhu and
                  Qingying Zhan and
                  Weiguo Su and
                  Wei Zhang and
                  Yilong Hao},
  title        = {Design and simulation of micro-platform for {MEMS} devices applied
                  in shock environment},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {445--448},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147464},
  doi          = {10.1109/NEMS.2015.7147464},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XuZZSZH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiLZHGH15,
  author       = {W. P. Cui and
                  G. D. Liu and
                  F. S. Zhang and
                  H. Hu and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {Silicon-silicon anodic bonding process with embedded glass},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {470--475},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147470},
  doi          = {10.1109/NEMS.2015.7147470},
  timestamp    = {Thu, 31 Aug 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/CuiLZHGH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/chinaf/HuangZZCHWZLGH14,
  author       = {Jingqing Huang and
                  Meng Zhao and
                  Tingting Zhang and
                  Zhongjian Chen and
                  Lichen Hong and
                  Feng Wu and
                  Yacong Zhang and
                  Wengao Lu and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {Linearity analysis of closed-loop capacitive accelerometer due to
                  distance mismatch between plates and the influence of compensation
                  capacitor array},
  journal      = {Sci. China Inf. Sci.},
  volume       = {57},
  number       = {6},
  pages        = {1--12},
  year         = {2014},
  url          = {https://doi.org/10.1007/s11432-013-4863-0},
  doi          = {10.1007/S11432-013-4863-0},
  timestamp    = {Mon, 02 Mar 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/chinaf/HuangZZCHWZLGH14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangGMH14,
  author       = {Yangxi Zhang and
                  Chengchen Gao and
                  Fanrui Meng and
                  Yilong Hao},
  title        = {A {SOI} sandwich differential capacitance accelerometer with low-stress
                  package},
  booktitle    = {9th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
  pages        = {341--345},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/NEMS.2014.6908822},
  doi          = {10.1109/NEMS.2014.6908822},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangGMH14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/mr/DongWWLGYHXSW12,
  author       = {Zhihua Dong and
                  Jinyan Wang and
                  Cheng P. Wen and
                  Shenghou Liu and
                  Rumin Gong and
                  Min Yu and
                  Yilong Hao and
                  Fujun Xu and
                  Bo Shen and
                  Yangyuan Wang},
  title        = {High temperature induced failure in Ti/Al/Ni/Au Ohmic contacts on
                  AlGaN/GaN heterostructure},
  journal      = {Microelectron. Reliab.},
  volume       = {52},
  number       = {2},
  pages        = {434--438},
  year         = {2012},
  url          = {https://doi.org/10.1016/j.microrel.2011.09.021},
  doi          = {10.1016/J.MICROREL.2011.09.021},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/DongWWLGYHXSW12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiGYHY11,
  author       = {Jian Cui and
                  Zhongyang Guo and
                  Zhenchuan Yang and
                  Yilong Hao and
                  Guizhen Yan},
  title        = {Improvement of transient response for drive loop of microgyroscope
                  using 2-DOF {PID} controller},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {281--284},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017348},
  doi          = {10.1109/NEMS.2011.6017348},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/CuiGYHY11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuGZCH11,
  author       = {Qifang Hu and
                  Chengchen Gao and
                  Yangxi Zhang and
                  Jian Cui and
                  Yilong Hao},
  title        = {Design of a novel low cross-axis sensitivity micro-gravity sandwich
                  capacitance accelerometer},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {642--645},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017437},
  doi          = {10.1109/NEMS.2011.6017437},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HuGZCH11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangHWH10,
  author       = {Jian Wang and
                  Ying Huang and
                  Wengang Wu and
                  Yilong Hao},
  title        = {Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing
                  in liquid environment},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {255--258},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592202},
  doi          = {10.1109/NEMS.2010.5592202},
  timestamp    = {Tue, 13 Feb 2024 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WangHWH10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuLLHH10,
  author       = {Bo Liu and
                  Zhiqiu Lv and
                  Zhihong Li and
                  Xunjun He and
                  Yilong Hao},
  title        = {A surface micromachining process utilizing dual metal sacrificial
                  layer for fabrication of {RF} {MEMS} switch},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {620--623},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592479},
  doi          = {10.1109/NEMS.2010.5592479},
  timestamp    = {Sun, 02 Oct 2022 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiuLLHH10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuGHZYZ10,
  author       = {Qifang Hu and
                  Chengchen Gao and
                  Yilong Hao and
                  Dacheng Zhang and
                  Guizhen Yan and
                  Yangxi Zhang},
  title        = {Design and fabrication of a mems capacitive accelerometer based on
                  double-device-layers {SOI} wafer},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {1036--1039},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592578},
  doi          = {10.1109/NEMS.2010.5592578},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HuGHZYZ10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouHGLH09,
  author       = {Mingda Zhou and
                  Yilong Hao and
                  Chengchen Gao and
                  Zhihong Li and
                  Qifang Hu},
  title        = {Fabrication of complicated three dimensional structures utilizing
                  multi-stack bonding},
  booktitle    = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  pages        = {1107--1111},
  publisher    = {{IEEE} Computer Society},
  year         = {2009},
  url          = {https://doi.org/10.1109/NEMS.2009.5068767},
  doi          = {10.1109/NEMS.2009.5068767},
  timestamp    = {Thu, 23 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ZhouHGLH09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@article{DBLP:journals/mj/LingSCWYM06,
  author       = {Ling Li and
                  Shibing Long and
                  Congshun Wang and
                  Wengang Wu and
                  Yilong Hao and
                  Ming Liu},
  title        = {Modeling and simulation development of electron beam resist based
                  on cellular automata},
  journal      = {Microelectron. J.},
  volume       = {37},
  number       = {4},
  pages        = {317--320},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.mejo.2005.05.028},
  doi          = {10.1016/J.MEJO.2005.05.028},
  timestamp    = {Tue, 11 Feb 2025 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/LingSCWYM06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}