Impact of a 10nm Ultra-Thin BOX (UTBOX) and Ground Plane on FDSOI devices for 32nm node and below. - Fenouillet-Béranger, Claire; Perreau, P.; Denorme, S.; Tosti, L.; Andrieu, François; Weber, Olivier; Barnola, S.; Arvet, C.; Campidelli, Y.; Haendler, Sébastien; Beneyton, R.; Perrot, C.; et al. (2009)