BibTeX records: F. Nemouchi

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@inproceedings{DBLP:conf/essderc/Fenouillet-Beranger17,
  author       = {Claire Fenouillet{-}B{\'{e}}ranger and
                  S. Beaurepaire and
                  Fabien Deprat and
                  Alexandre Ayres De Sousa and
                  Laurent Brunet and
                  Perrine Batude and
                  Olivier Rozeau and
                  Fran{\c{c}}ois Andrieu and
                  Paul Besombes and
                  M.{-}P. Samson and
                  Bernard Previtali and
                  F. Nemouchi and
                  G. Rodriguez and
                  Philippe Rodriguez and
                  R. Famulok and
                  Nils Rambal and
                  Viorel Balan and
                  Z. Saghi and
                  V. Jousseaume and
                  Charles{-}Antoine Gu{\'{e}}rin and
                  F. Ibars and
                  F. Proud and
                  D. Nouguier and
                  David Ney and
                  V. Delaye and
                  H. Dansas and
                  X. Federspiel and
                  Maud Vinet},
  title        = {Guidelines for intermediate back end of line {(BEOL)} for 3D sequential
                  integration},
  booktitle    = {47th European Solid-State Device Research Conference, {ESSDERC} 2017,
                  Leuven, Belgium, September 11-14, 2017},
  pages        = {252--255},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/ESSDERC.2017.8066639},
  doi          = {10.1109/ESSDERC.2017.8066639},
  timestamp    = {Fri, 09 Sep 2022 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/Fenouillet-Beranger17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}