"World's First GAA 3nm Foundry platform Technology (SF3) with Novel ..."

Jaehun Jeong et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185353

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-28

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Jaehun Jeong, Sanghyeon Lee, Sada-Aki Masuoka, Shincheol Min, Sanghoon Lee, Seungkwon Kim, Taehun Myung, Byungha Choi, Chang-Woo Sohn, Sung Won Kim, Jeongmin Choi, Jungmin Park, Hyungjong Lee, Taeyoung Kim, Seokhoon Kim, Yuri Yasuda-Masuoka, Ja-Hum Ku, Gitae Jeong:
World's First GAA 3nm Foundry platform Technology (SF3) with Novel Multi-Bridge-Channel-FET (MBCFET™) Process. VLSI Technology and Circuits 2023: 1-2

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