"Study of the Mechanical Stress Impact on Silicide Contact Resistance by ..."

Yefan Liu et al. (2019)

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DOI: 10.1109/IRPS.2019.8720416

access: closed

type: Conference or Workshop Paper

metadata version: 2019-05-31

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Yefan Liu, Hao Yu, Gaspard Hiblot, Anastasiia Kruv, Marc Schaekers, Naoto Horiguchi, Dimitrios Velenis, Ingrid De Wolf:
Study of the Mechanical Stress Impact on Silicide Contact Resistance by 4-Point Bending. IRPS 2019: 1-5

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