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High performance medium current ion implanter system EXCEED3000AH-G3 / Sakai, Shigeki ; Tanjyo, Masayasu ; Hamamoto, Nariaki ; Umisedo, Sei ; Kobayashi, Tomoaki ; Yamashita, Takatoshi ; Matsumoto, Takao ; Ikejiri, Tadashi ; Tanaka, Kohei ; Koga, Yuji et al.
2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 605-608 External link: Published version from AIP
In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.605-608

Nissin Ion Equipment Indirectly Heated Cathode Ion / Tanaka, Kohei ; Umisedo, Sei ; Miyabayashi, Kenji ; Fujita, Hideki ; Kinoyama, Toshiaki ; Hamamoto, Nariaki ; Yamashita, Takatoshi ; Tanjyo, Masayasu
2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 421-424 External link: Published version from AIP
In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.421-424

Implantation characteristics by boron cluster ion implantation / Nagayama, Tsutomu ; Hamamoto, Nariaki ; Umisedo, Sei ; Tanjyo, Masayasu ; Aoyama, Takayuki
2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 186-189 External link: Published version from AIP
In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.186-189

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5	Umisedo, S

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