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Development of copper electroformed vacuum chambers with integrated non-evaporable getter thin film coatings / Amadora, Lucia Lain (CERN ; UTINAM, Besancon) ; Chiggiato, Paolo (CERN) ; Ferreira, Leonel M A (CERN) ; Nistor, Valentin (CERN) ; Fontenla, Ana T Perez (CERN) ; Taborelli, Mauro (CERN) ; Vollenberg, Wilhelmus (CERN) ; Doche, Marie-Laure (UTINAM, Besancon) ; Hihn, Jean-Yves (UTINAM, Besancon)
First results concerning a new approach of TiZrV non-evaporable getter (NEG) thin films coating on very small diameter vacuum chambers are presented. This new process is based on the electroforming of a vacuum chamber around a sacrificial mandrel, which is precoated with a NEG thin film. [...]
2017 - Published in : J. Vac. Sci. Technol. A 36 (2018) 021601

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1 Doche, M
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