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Characterization of Parasitic Transistor Phenomenon in Nano-scale NAND Flash Device by Blanket Tilt Implantation and Scanning Capacitance Microscopy / Lee, Dong-Ho ; Shin, Seung-Woo ; Ryu, Choon-Kun ; Lee, Moon-Keun ; Kwak, Noh-Yeal ; Shon, Hyun-Soo ; Lee, Byung-Seok ; Park, Sung-Ki ; Kwack, Kae-Dal 2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 550-553 External link: Published version from AIP In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.550-553 Registro completo - Registros similares

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