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Multicusp Ion Source for Ion Projection Lithography / Lee, Y ; Leung, K N ; Williams, M D ; Bruenger, W H ; Fallmann, W ; Löschner, H ; Stengl, G 1999 IEEE Published version, local copy: PDF; In : 18th Biennial Particle Accelerator Conference, New York, NY, USA, 29 Mar - 2 Apr 1999, pp.e-proc. 2575 Registre complet - Registres semblants

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