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Preprint
Report number	SLAC-PUB-11564
Title	Nitrogen Doping and Thermal Stability in HfSiO(x)N(y) Studied by Photoemission and X-ray Absorption Spectroscopy
Author(s)	Toyoda, Satoshi ; Ando, Takashi ; Fukuda, Seiichi ; Lee, Dong Ick ; Okabayashi, Jun ; Oshima, Masaharu ; Pianetta, Piero A ; Sun, Shiyu ; Sun, Steven ; Takahashi, Haruhiko
Affiliation	(SLAC, SSRL) ; (SONY, Atsugi) ; (Tokyo Univ.)
Publication	2005
Imprint	14 Dec 2005
Number of pages	11
Other source	Inspire