| Article | |
| Title | Development of Semi-mass Production Apparatus For Antistatic Ic Tray With Low Energy Ion Beam |
| Author(s) | Lee, J H ; Lee Jae Sik ; Kil, J K ; Ha, J H ; Choi, B H |
| Publication | 2001 |
| In: | 2nd Asian Particle Accelerator Conference, Beijing, China, 17 - 21 Sep 2001, pp.THP054 |
| Subject category | Accelerators and Storage Rings |
Datensatz erzeugt am 2005-12-14, letzte Änderung am 2024-02-23
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Published version from JACoW
Published version from JACoW