| Página principal > Resonance ultrasonic vibrations in Cz-Si wafers as a possible diagnostic technique in ion implantation |
| Article | |
| Title | Resonance ultrasonic vibrations in Cz-Si wafers as a possible diagnostic technique in ion implantation |
| Author(s) | Zhao, Z Y ; Anthony, M ; Anudson, R ; Belyaev, A ; Ostapenko, S S ; Tvinnereim, M |
| Publication | 2000 |
| In: | 16th International Conference on the Application of Accelerators in Research and Industry, Denton, TX, USA, 1 - 5 Nov 2000, pp.1036-1039 |