CERN Accelerating science

Article
Title Process control strategy of the silicon sensors production for the CMS tracker
Author(s) Fontaine, J C ; Bergauer, T ; Helleboid, J M ; Krammer, M ; Macchiolo, A
Affiliation (Grp. de Rech./Phys. Hautes Energies UHA)
Publication 2002
In: Nucl. Instrum. Methods Phys. Res., A 494 (2002) 218-222
DOI 10.1016/S0168-9002(02)01469-9
Subject category Detectors and Experimental Techniques
Accelerator/Facility, Experiment CERN LHC ; CMS
Abstract In the framework of the CMS experiment, a quality control of the silicon sensors production has been developed for the tracker construction. The emphasis here is on the process stability control based on the characterization of test-structures made of eight different components. The measurements carried out are presented. Then the set-up and the software developed for this purpose are explained. The first results, including the ones obtained on faulty batches of sensors, are shown.

Corresponding record in: Inspire


 Δημιουργία εγγραφής 2003-06-18, τελευταία τροποποίηση 2016-07-04