Hlavná stránka > High energy metal ion implantation using "Magis", a novel, broad-beam, Marx-generator-based ion source |
Article | |
Report number | IBM-M-313 ; LBL-38512 |
Title | High energy metal ion implantation using "Magis", a novel, broad-beam, Marx-generator-based ion source |
Author(s) | Anders, A ; Brown, I G ; Dickinson, M R ; MacGill, R A |
Publication | 1996 |
Imprint | Aug 1996 |
Number of pages | 16 |
In: | 10th International Conference on Ion-beam Modification of Materials, Albuquerque, NM, USA, 1 - 6 Sep 1996, pp.992-995 |
Subject category | Accelerators and Storage Rings |