CERN Accelerating science

Article
Report number IBM-M-313 ; LBL-38512
Title High energy metal ion implantation using "Magis", a novel, broad-beam, Marx-generator-based ion source
Author(s) Anders, A ; Brown, I G ; Dickinson, M R ; MacGill, R A
Publication 1996
Imprint Aug 1996
Number of pages 16
In: 10th International Conference on Ion-beam Modification of Materials, Albuquerque, NM, USA, 1 - 6 Sep 1996, pp.992-995
Subject category Accelerators and Storage Rings



 Záznam vytvorený 1996-12-04, zmenený 2015-05-22


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