CERN Accelerating science

Article
Report number	KEK-93-165
Title	Development of novel fabrication techniques for a silicon microvertex detector unit using the flip-chip bonding method
Author(s)	Saitô, Y ; Takeuchi, H ; Mandai, M ; Koseki, O ; Yoshino, T ; Kanazawa, H ; Yamanaka, J ; Miyahara, S ; Kamiya, M ; Fujita, Y ; Higashi, Y ; Ikeda, H ; Ikeda, M ; Koike, S ; Matsuda, T ; Ozaki, H ; Tanaka, M ; Tsuboyama, T ; Avrillon, S ; Okuno, S ; Haba, J ; Hanai, H ; Tatsumi, D ; Adachi, K ; Kawasaki, S ; Nagashima, Y ; Mori, S ; Yusa, K ; Fukunaga, C ; Matsushita, T ; Miyata, H ; Miyano, K
Publication	1993
Imprint	Dec 1993
Number of pages	7
In:	IEEE Trans. Nucl. Sci. 41, 4 (1994) pp.1192-1196
In:	40th IEEE Nuclear Science Symposium and Medical Imaging Conference, San Francisco, CA, USA, 30 Oct - 6 Nov 1993, pp.526-529
Subject category	Detectors and Experimental Techniques

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