Начало > Optical and Thermal Comparative Study of a Soft X-Ray Lithography Beamline for the Australian Synchrotron |
Article | |
Title | Optical and Thermal Comparative Study of a Soft X-Ray Lithography Beamline for the Australian Synchrotron |
Author(s) | Altissimo, Matteo ; Wang, David ; Wilkins, Steve |
Publication | 2007 |
In: | AIP Conf. Proc. 879 (2007) pp.1486-1489 |
In: | 9th International Conference On Synchrotron Radiation Instrumentation, Daegu, Korea, 28 May - 2 Jun 2006, pp.1486-1489 |