| Article | |
| Title | Enhancing the Ibis $i2000^{TM}$ SIMOX Oxygen Ion Implanter |
| Author(s) | McKenna, C ; Dolan, R ; Blake, J ; Richards, S |
| Publication | 2006 |
| In: | AIP Conf. Proc. 866 (2006) pp.622-625 |
| In: | 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.622-625 |
Rekord stworzony 2007-03-14, ostatnia modyfikacja 2008-01-31
Link zewnętrzny:
Published version from AIP
Published version from AIP